▶ Mass Range:
1 –100, 200,300 amu

▶ Resolution:
0.5 – 2.5 u (10% peak height 기준)

▶ Measuring Speed:
1 ms/u – 16 s/u

▶ Ion Source:
Open type, 2 filaments

선택 옵션:
  • Cross-Beam, 2 filaments
  • Gas tight, 2 filaments
  • Grid, 2 filaments
  • Open, 2 filaments

▶ Filament:
Iridium coated with Y₂O₃

옵션:
  • Iridium coated with Y₂O₃
  • Tungsten

▶ Detector:

C-SEM

Faraday

▶ Sensitivity (Ar 기준):

Faraday: 4 × 10⁻⁴ A/hPa

▶ Detection Limit (C-SEM):

4 × 10⁻¹⁵ hPa (3 × 10⁻¹⁵ Torr, 4 × 10⁻¹⁵ mbar)

▶ Operating Pressure Max:

Faraday: 5 × 10⁻⁴ hPa

SEM: 5 × 10⁻⁵ hPa

▶ Peak Ratio Reproducibility:
0.5 %

▶ Mass Contribution (40 → 41):
20 ppm

▶ Rod System:

직경: 6 mm

길이: 125 mm

▶ Construction Form:
0° (선택됨)

옵션: 0°, 90°

▶ Mounting Orientation:
자유

▶ Ambient Temperature:

Analyzer: 150 °C

Electronics: 5–50 °C

▶ Bakeout Temperature:
300 °C

▶ Connection Flange:
DN 40 CF-F

▶ Electrical Input:

전압: 100–240 V AC, 50/60 Hz

아날로그 입력: 1 × ±10 V / 12 Bit

디지털 입력: 2 × 24 V

I/O 인터페이스: Ethernet

장치 측 인터페이스: D-Sub, 15핀, female

▶ Relay:
1개

▶ 무게:
3.2 kg (7.05 lb)